{"id":232979,"date":"2024-10-19T15:10:55","date_gmt":"2024-10-19T15:10:55","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/bs-en-62047-32006\/"},"modified":"2024-10-25T09:38:34","modified_gmt":"2024-10-25T09:38:34","slug":"bs-en-62047-32006","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/bsi\/bs-en-62047-32006\/","title":{"rendered":"BS EN 62047-3:2006"},"content":{"rendered":"
Specifies a standard test piece, which is used to guarantee the propriety and accuracy of a tensile testing system for thin film materials with length and width under 1 mm and thickness under 10 m, which are main structural materials for microelectromechanical systems (MEMS), micromachines and similar devices. It is based on such a concept that a tensile testing system can be guaranteed in propriety and accuracy, when the measured tensile strengths of the standard test pieces, whose tensile strength is pre-determined, are within the designated range. It also specifies the test pieces to minimize characteristics deviation among the pieces.<\/p>\n
PDF Pages<\/th>\n | PDF Title<\/th>\n<\/tr>\n | ||||||
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5<\/td>\n | CONTENTS <\/td>\n<\/tr>\n | ||||||
6<\/td>\n | 1 Scope 2 Normative references 3 Test piece materials 4 Test piece fabrications <\/td>\n<\/tr>\n | ||||||
7<\/td>\n | 5 Plane shape of test piece 6 Test piece thickness 7 Gauge mark 8 Test <\/td>\n<\/tr>\n | ||||||
8<\/td>\n | 9 Document attached to standard test pieces <\/td>\n<\/tr>\n | ||||||
9<\/td>\n | Annex A (informative) Test piece <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":" Semiconductor devices. Micro-electromechanical devices – Thin film standard test piece for tensile testing<\/b><\/p>\n |