{"id":372970,"date":"2024-10-20T02:31:44","date_gmt":"2024-10-20T02:31:44","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/bsi-pd-iso-tr-159692021\/"},"modified":"2024-10-26T04:25:56","modified_gmt":"2024-10-26T04:25:56","slug":"bsi-pd-iso-tr-159692021","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/bsi\/bsi-pd-iso-tr-159692021\/","title":{"rendered":"BSI PD ISO\/TR 15969:2021"},"content":{"rendered":"

This document provides guidelines for measuring the sputtered depth in sputtered depth profiling.<\/p>\n

The methods of sputtered depth measurement described in this document are applicable to techniques of surface chemical analysis when used in combination with ion bombardment for the removal of a part of a solid sample to a typical sputtered depth of up to several micrometres. The depth typically determined by this approach is between 1 nm to 500 \u00b5m.<\/p>\n

PDF Catalog<\/h4>\n\n\n\n\n\n\n\n\n\n\n\n\n\n
PDF Pages<\/th>\nPDF Title<\/th>\n<\/tr>\n
2<\/td>\nNational foreword <\/td>\n<\/tr>\n
6<\/td>\nForeword <\/td>\n<\/tr>\n
7<\/td>\nIntroduction <\/td>\n<\/tr>\n
9<\/td>\n1 Scope
2 Normative references
3 Terms and definitions <\/td>\n<\/tr>\n
10<\/td>\n4 Methods of determination of the sputtered depth
4.1 Crater depth measurement after sputter profiling
4.1.1 General description
4.1.2 Mechanical stylus crater depth measurement <\/td>\n<\/tr>\n
11<\/td>\n4.1.3 Optical interferometry crater depth measurement <\/td>\n<\/tr>\n
13<\/td>\n4.2 Comparison with sputter profiled samples having interfaces as depth markers
4.2.1 General description
4.2.2 Reference materials <\/td>\n<\/tr>\n
14<\/td>\n4.2.3 Interface depth determination for layered structures by independent measurements <\/td>\n<\/tr>\n
18<\/td>\n4.3 Typical applications and uncertainties of the different methods <\/td>\n<\/tr>\n
19<\/td>\nAnnex A Survey of typical applications and uncertainties of the different methods <\/td>\n<\/tr>\n
20<\/td>\nBibliography <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":"

Surface chemical analysis. Depth profiling. Measurement of sputtered depth<\/b><\/p>\n\n\n\n\n
Published By<\/td>\nPublication Date<\/td>\nNumber of Pages<\/td>\n<\/tr>\n
BSI<\/b><\/a><\/td>\n2021<\/td>\n22<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":372978,"template":"","meta":{"rank_math_lock_modified_date":false,"ep_exclude_from_search":false},"product_cat":[1000,2641],"product_tag":[],"class_list":{"0":"post-372970","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-71-040-40","7":"product_cat-bsi","9":"first","10":"instock","11":"sold-individually","12":"shipping-taxable","13":"purchasable","14":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product\/372970","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media\/372978"}],"wp:attachment":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media?parent=372970"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_cat?post=372970"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_tag?post=372970"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}