{"id":372970,"date":"2024-10-20T02:31:44","date_gmt":"2024-10-20T02:31:44","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/bsi-pd-iso-tr-159692021\/"},"modified":"2024-10-26T04:25:56","modified_gmt":"2024-10-26T04:25:56","slug":"bsi-pd-iso-tr-159692021","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/bsi\/bsi-pd-iso-tr-159692021\/","title":{"rendered":"BSI PD ISO\/TR 15969:2021"},"content":{"rendered":"
This document provides guidelines for measuring the sputtered depth in sputtered depth profiling.<\/p>\n
The methods of sputtered depth measurement described in this document are applicable to techniques of surface chemical analysis when used in combination with ion bombardment for the removal of a part of a solid sample to a typical sputtered depth of up to several micrometres. The depth typically determined by this approach is between 1 nm to 500 \u00b5m.<\/p>\n
PDF Pages<\/th>\n | PDF Title<\/th>\n<\/tr>\n | ||||||
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2<\/td>\n | National foreword <\/td>\n<\/tr>\n | ||||||
6<\/td>\n | Foreword <\/td>\n<\/tr>\n | ||||||
7<\/td>\n | Introduction <\/td>\n<\/tr>\n | ||||||
9<\/td>\n | 1 Scope 2 Normative references 3 Terms and definitions <\/td>\n<\/tr>\n | ||||||
10<\/td>\n | 4 Methods of determination of the sputtered depth 4.1 Crater depth measurement after sputter profiling 4.1.1 General description 4.1.2 Mechanical stylus crater depth measurement <\/td>\n<\/tr>\n | ||||||
11<\/td>\n | 4.1.3 Optical interferometry crater depth measurement <\/td>\n<\/tr>\n | ||||||
13<\/td>\n | 4.2 Comparison with sputter profiled samples having interfaces as depth markers 4.2.1 General description 4.2.2 Reference materials <\/td>\n<\/tr>\n | ||||||
14<\/td>\n | 4.2.3 Interface depth determination for layered structures by independent measurements <\/td>\n<\/tr>\n | ||||||
18<\/td>\n | 4.3 Typical applications and uncertainties of the different methods <\/td>\n<\/tr>\n | ||||||
19<\/td>\n | Annex A Survey of typical applications and uncertainties of the different methods <\/td>\n<\/tr>\n | ||||||
20<\/td>\n | Bibliography <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":" Surface chemical analysis. Depth profiling. Measurement of sputtered depth<\/b><\/p>\n |