ASTM-F390 2003

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F390-98(2003) Standard Test Method for Sheet Resistance of Thin Metallic Films With a Collinear Four-Probe Array

Published By	Publication Date	Number of Pages
ASTM	2003	4

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Categories: 77.040.99 - Other methods of testing of metals, ASTM

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Description

ASTM F390-98-Reapproved2003

Historical Standard: Standard Test Method for Sheet Resistance of Thin Metallic Films With a Collinear Four-Probe Array

ASTM F390

Scope

1.1 This test method covers the measurement of the sheet resistance of metallic thin films with a collinear four-probe array. It is intended for use with rectangular metallic films between 0.01 and 100 [mu]m thick, formed by deposition of a material or by a thinning process and supported by an insulating substrate, in the sheet resistance range from 10 to 10 [omega]/[open-box] (see 3.1.3).

1.2 This test method is suitable for referee measurement purposes as well as for routine acceptance measurements.

1.3 The values stated in Si units are to be regarded as the standard. The values given in parentheses are for information only.

1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Keywords

collinear four-point probe; electrical resistance; electrical sheet resistance; four-point probe; resistance; thin films; thin conductive films; thin metallic films

ICS Code

ICS Number Code 77.040.99 (Other methods of testing of metals)

DOI: 10.1520/F0390-98R03

PDF Catalog

PDF Pages	PDF Title
1	Scope Referenced Documents Terminology Summary of Test Method Apparatus
2	Test Specimen Suitability of Test Equipment FIG. 1
3	Procedure Calculations TABLE 1
4	Report Precision and Bias Keywords TABLE 2

Additional information

Standard Title	F390-98(2003) Standard Test Method for Sheet Resistance of Thin Metallic Films With a Collinear Four-Probe Array
Published Code	ASTM
Publication Date	2003
Pages Count	4
ICS Codes	77.040.99 - Other methods of testing of metals