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BS EN ISO 25178-607:2019

$142.49

Geometrical product specifications (GPS). Surface texture: Areal – Nominal characteristics of non-contact (confocal microscopy) instruments

Published By Publication Date Number of Pages
BSI 2019 30
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This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well.

PDF Catalog

PDF Pages PDF Title
2 undefined
4 European foreword
Endorsement notice
6 Foreword
7 Introduction
8 1 Scope
2 Normative references
3 Terms and definitions
12 4 Descriptions of the influence quantities
14 Annex A (informative) Classification of in-plane scanning techniques for confocal microscopes
20 Annex B (informative) Theory of operation of confocal microscopes
24 Annex C (informative) Thin and thick films with confocal microscopes
26 Annex D (informative) Relation to the GPS matrix model
27 Bibliography
BS EN ISO 25178-607:2019
$142.49