BS ISO 19606:2017

$167.15

Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for surface roughness of fine ceramic films by atomic force microscopy

Published By	Publication Date	Number of Pages
BSI	2017	36

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Categories: 81.060.30 - Advanced ceramics, BSI

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PDF Pages

PDF Title

Foreword

Introduction

1 Scope
2 Normative references
3 Terms and definitions

4 Test environment
5 Roughness measurement specimens
6 Test apparatus
6.1 Cantilever
6.2 Scanner

6.3 Specimen stage
7 Test apparatus calibration

8 Probe-tip diameter evaluation standard plate
9 Calibration of X-Y and Z scan axes

10 Probe-tip error evaluation
10.1 Outline of probe-tip error evaluation

10.2 Measurements of preliminary Ra and RSm
10.3 Evaluation of probe-tip diameter

10.4 Evaluation of error in roughness measurements

11 Roughness measurements of specimen

12 Test report

Annex A (normative) Determination of D from D’

Annex B (informative) Method to determine criteria for probe-tip error

Bibliography

Status	Under Review
Pages	36
Publication Date	2017-03-31
ISBN	978 0 580 86440 7
Standard Number	BS ISO 19606:2017
Title	Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for surface roughness of fine ceramic films by atomic force microscopy
Identical National Standard Of	ISO 19606:2017
Descriptors	Ceramics, Force, Roughness (surface), Special ceramics, Calibration, Thin films, Surfaces, Test methods, Surface-roughness measurement
Publisher	BSI
Committee	RPI/13
ICS Codes	81.060.30 - Advanced ceramics


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BS ISO 19606:2017

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