BSI 20/30400313 DC:2020 Edition
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BS ISO 23131. Ellipsometry. Principles
Published By | Publication Date | Number of Pages |
BSI | 2020 | 22 |
This standard deals with ellipsometry, a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories, preferably for stand-alone measuring systems with special regard to ISO/IEC Guide 98-3 conforming presentation of the uncertainty of results.