ISO 29301:2017

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Microbeam analysis — Analytical electron microscopy — Methods for calibrating image magnification by using reference materials with periodic structures

Published By	Publication Date	Number of Pages
ISO	2017-12	52

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Categories: 37.020 - Optical equipment, ISO

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Description

ISO 29301:2017 specifies a calibration procedure applicable to images recorded over a wide magnification range in a transmission electron microscope (TEM). The reference materials used for calibration possess a periodic structure, such as a diffraction grating replica, a super-lattice structure of semiconductor or an analysing crystal for X-ray analysis, and a crystal lattice image of carbon, gold or silicon. This document is applicable to the magnification of the TEM image recorded on a photographic film, or an imaging plate, or detected by an image sensor built into a digital camera. This document also refers to the calibration of a scale bar. This document does not apply to the dedicated critical dimension measurement TEM (CD-TEM) and the scanning transmission electron microscope (STEM).

Additional information

Published Code	ISO
Published By	International Organization for Standardization
Publication Date	2017-12
Pages Count	52
Language	English
Edition	2
File Size	1.4 MB
ICS Codes	37.020 - Optical equipment

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ISO 29301:2017

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