{"id":291122,"date":"2024-10-19T19:45:50","date_gmt":"2024-10-19T19:45:50","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/bs-iso-119522019\/"},"modified":"2024-10-25T16:47:16","modified_gmt":"2024-10-25T16:47:16","slug":"bs-iso-119522019","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/bsi\/bs-iso-119522019\/","title":{"rendered":"BS ISO 11952:2019"},"content":{"rendered":"<p><label>1<\/label><\/p>\n<p>This document specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes (SPMs) for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required.<\/p>\n<p>This document has the following objectives:<\/p>\n<ul>\n<li><label>\u2014<\/label>\n<p>to increase the comparability of measurements of geometrical quantities made using SPMs by traceability to the unit of length;<\/p>\n<\/li>\n<li><label>\u2014<\/label>\n<p>to define the minimum requirements for the calibration process and the conditions of acceptance;<\/p>\n<\/li>\n<li><label>\u2014<\/label>\n<p>to ascertain the instrument&#8217;s ability to be calibrated (assignment of a \u201ccalibrate-ability\u201d category to the instrument);<\/p>\n<\/li>\n<li><label>\u2014<\/label>\n<p>to define the scope of the calibration (conditions of measurement and environments, ranges of measurement, temporal stability, transferability);<\/p>\n<\/li>\n<li><label>\u2014<\/label>\n<p>to provide a model, in accordance with <span class=\"std\"> <span class=\"std-ref\">ISO\/IEC&nbsp;Guide&nbsp;98-3<\/span> <\/span>, to calculate the uncertainty for simple geometrical quantities in measurements using an SPM;<\/p>\n<\/li>\n<li><label>\u2014<\/label>\n<p>to define the requirements for reporting results.<\/p>\n<\/li>\n<\/ul>\n<h4>PDF Catalog<\/h4>\n<table border=\"1px\" class=\"des-table\">\n<tr>\n<th>PDF Pages<\/th>\n<th>PDF Title<\/th>\n<\/tr>\n<tr>\n<td><b>2<b><\/td>\n<td>undefined  <\/td>\n<\/tr>\n<tr>\n<td><b>7<b><\/td>\n<td>Foreword  <\/td>\n<\/tr>\n<tr>\n<td><b>11<b><\/td>\n<td>Introduction  <\/td>\n<\/tr>\n<tr>\n<td><b>13<b><\/td>\n<td>1 Scope <br \/> 2 Normative references <br \/> 3 Terms and definitions  <\/td>\n<\/tr>\n<tr>\n<td><b>14<b><\/td>\n<td>4 Symbols  <\/td>\n<\/tr>\n<tr>\n<td><b>16<b><\/td>\n<td>5 Characteristics of SPMs <br \/> 5.1 Components of an SPM  <\/td>\n<\/tr>\n<tr>\n<td><b>18<b><\/td>\n<td>5.2 Metrological categories of SPMs <br \/> 5.3 Block diagram of an SPM <br \/> 5.3.1 For category C: <br \/> 5.3.2 Additionally, for category B:  <\/td>\n<\/tr>\n<tr>\n<td><b>19<b><\/td>\n<td>5.3.3 Additionally, for category A: <br \/> 5.4 Calibration interval  <\/td>\n<\/tr>\n<tr>\n<td><b>20<b><\/td>\n<td>6 Preliminary characterization of the measuring system <br \/> 6.1 Overview of the instrument characteristics and influencing factors to be investigated  <\/td>\n<\/tr>\n<tr>\n<td><b>22<b><\/td>\n<td>6.2 Waiting times after interventions in the measuring system (e.g. instrument installation, intrinsic effects, carrying out operation, warm-up, tip\/specimen change) <br \/> 6.2.1 Adjustment of the instrument to ambient conditions <br \/> 6.2.2 Potential causes of drift <br \/> 6.2.3 Procedure  <\/td>\n<\/tr>\n<tr>\n<td><b>23<b><\/td>\n<td>6.3 External influences <br \/> 6.3.1 Sources of external influences <br \/> 6.3.2 Consequences of external influences and countermeasures <br \/> 6.4 Summary  <\/td>\n<\/tr>\n<tr>\n<td><b>24<b><\/td>\n<td>7 Calibration of scan axes <br \/> 7.1 General <br \/> 7.2 Measurement standards  <br \/> 7.2.1 Requirements for measurement standards  <\/td>\n<\/tr>\n<tr>\n<td><b>25<b><\/td>\n<td>7.2.2 Handling of measurement standards <br \/> 7.3 Xy-scanner guidance deviations of the x- and y-axes (xtz, ytz) <br \/> 7.3.1 Definition of xy-scanner guidance deviations in vertical direction (z-plane) <br \/> 7.3.2 Measurement strategy  <\/td>\n<\/tr>\n<tr>\n<td><b>26<b><\/td>\n<td>7.3.3 Flatness measurement standards  <\/td>\n<\/tr>\n<tr>\n<td><b>27<b><\/td>\n<td>7.3.4 Measurements <br \/> 7.3.5 \u200bEvaluation of results  <\/td>\n<\/tr>\n<tr>\n<td><b>28<b><\/td>\n<td>7.3.6 Summary <br \/> 7.3.7 Extended calibration measurements  <\/td>\n<\/tr>\n<tr>\n<td><b>29<b><\/td>\n<td>7.4 Calibration of x- and y-axis (Cx, Cy) and of rectangularity (\u03d5xy) and determination of deviations (xtx, yty, ywx) <br \/> 7.4.1 General <br \/> 7.4.2 Definition of pitch px and py and rectangularity (\u03d5xy) in the x-y-plane <br \/> 7.4.3 Measurement strategy  <\/td>\n<\/tr>\n<tr>\n<td><b>30<b><\/td>\n<td>7.4.4 Selection of lateral measurement standards  <\/td>\n<\/tr>\n<tr>\n<td><b>31<b><\/td>\n<td>7.4.5 Basic calibration \u2014 Adjustments and measurements  <\/td>\n<\/tr>\n<tr>\n<td><b>32<b><\/td>\n<td>7.4.6 Extended calibrations (scan speed, angle, and eccentric measurements)  <\/td>\n<\/tr>\n<tr>\n<td><b>33<b><\/td>\n<td>7.4.7 \u200bEvaluation  <\/td>\n<\/tr>\n<tr>\n<td><b>36<b><\/td>\n<td>7.4.8 Extended evaluations: nonlinearity of the x-y-axis  <\/td>\n<\/tr>\n<tr>\n<td><b>37<b><\/td>\n<td>7.4.9 Summary  <\/td>\n<\/tr>\n<tr>\n<td><b>38<b><\/td>\n<td>7.5 Calibration of the z-axis Cz, \u03d5xz, and \u03d5yz, and determination of the deviations ztz, zwx, and zwy <br \/> 7.5.1 General <br \/> 7.5.2 Definitions of the step height  <\/td>\n<\/tr>\n<tr>\n<td><b>39<b><\/td>\n<td>7.5.3 Measurement strategy <br \/> 7.5.4 Selection of step height measurement standards  <\/td>\n<\/tr>\n<tr>\n<td><b>40<b><\/td>\n<td>7.5.5 Basic calibration \u2014 Adjustments and measurements  <\/td>\n<\/tr>\n<tr>\n<td><b>41<b><\/td>\n<td>7.5.6 Extended calibrations  <\/td>\n<\/tr>\n<tr>\n<td><b>42<b><\/td>\n<td>7.5.7 Evaluations  <\/td>\n<\/tr>\n<tr>\n<td><b>46<b><\/td>\n<td>7.5.8 Summary <br \/> 7.6 3D measurement standards for alternative and extended calibration <br \/> 7.6.1 General <br \/> 7.6.2 Requirements for 3D measurement standards  <\/td>\n<\/tr>\n<tr>\n<td><b>47<b><\/td>\n<td>7.6.3 Selection of the 3D measurement standards  <\/td>\n<\/tr>\n<tr>\n<td><b>48<b><\/td>\n<td>7.6.4 Carrying-out of the basic calibration <br \/> 7.6.5 \u200bEvaluation of the measurements  <\/td>\n<\/tr>\n<tr>\n<td><b>49<b><\/td>\n<td>7.6.6 Extended calibrations <br \/> 7.6.7 Advantages and disadvantages of the 3D measurement standard  <\/td>\n<\/tr>\n<tr>\n<td><b>50<b><\/td>\n<td>8 Report of calibration results <br \/> 8.1 General <br \/> 8.2 Equipment used <br \/> 8.3 Statements on ambient conditions  <\/td>\n<\/tr>\n<tr>\n<td><b>51<b><\/td>\n<td>8.4 From Clause 5: Preliminary investigations <br \/> 8.5 From Clause 5: Calibration \u2014 Details of measurement standards, scan range and scan speed <br \/> 8.6 Further statements <br \/> 9 Uncertainties of measurement <br \/> 9.1 General  <\/td>\n<\/tr>\n<tr>\n<td><b>52<b><\/td>\n<td>9.2 Vertical measurand (height and depth)  <\/td>\n<\/tr>\n<tr>\n<td><b>53<b><\/td>\n<td>10 Report of results (form)  <\/td>\n<\/tr>\n<tr>\n<td><b>54<b><\/td>\n<td>Annex A (informative)  Example of superposition of disturbing influences in the topography image  <\/td>\n<\/tr>\n<tr>\n<td><b>56<b><\/td>\n<td>Annex B (informative)  Sound investigations: effects of a sound-proofing hood  <\/td>\n<\/tr>\n<tr>\n<td><b>58<b><\/td>\n<td>Annex C (informative)  Thermal isolation effect of a sound-proofing hood\/measuring cabin  <\/td>\n<\/tr>\n<tr>\n<td><b>60<b><\/td>\n<td>Annex D (informative)  Handling of contaminations in recorded topography images  <\/td>\n<\/tr>\n<tr>\n<td><b>61<b><\/td>\n<td>Annex E (informative)  Step height determination: comparison between histogram and ISO 5436-1 method  <\/td>\n<\/tr>\n<tr>\n<td><b>63<b><\/td>\n<td>Annex F (normative)  Uncertainty of measurement for lateral measurands (pitch, position, diameter)  <\/td>\n<\/tr>\n<tr>\n<td><b>68<b><\/td>\n<td>Bibliography  <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":"<p><b>Surface chemical analysis. Scanning-probe microscopy. Determination of geometric quantities using SPM: Calibration of measuring systems<\/b><\/p>\n<table class=\"shortdes-table\" style=\"width: 100%\" border=\"0\" cellspacing=\"0\" cellpadding=\"0\">\n<tbody>\n<tr>\n<td>Published By<\/td>\n<td>Publication Date<\/td>\n<td>Number of Pages<\/td>\n<\/tr>\n<tr>\n<td><a href=\"https:\/\/pdfstandards.shop\/product-category\/publishers\/bsi\/\"><b>BSI<\/b><\/a><\/td>\n<td>2019<\/td>\n<td>72<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":291128,"template":"","meta":{"rank_math_lock_modified_date":false,"ep_exclude_from_search":false},"product_cat":[1000,2641],"product_tag":[],"class_list":{"0":"post-291122","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-71-040-40","7":"product_cat-bsi","9":"first","10":"instock","11":"sold-individually","12":"shipping-taxable","13":"purchasable","14":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product\/291122","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media\/291128"}],"wp:attachment":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media?parent=291122"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_cat?post=291122"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_tag?post=291122"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}